RESEARCH ON THE USE OF INTELLIGENT MICROSCOPIC SYSTEMS USED IN MICRO-NANOMECHATRONIC MEASURING AND PROCESSINGS LABORATORIES

Autor/autori: PhD Student Simona ISTRITEANU, Prof.PhD Eng.EurIng. Gheorghe Ion GHEORGHE

Rezumat: Lucrarea stiintifica prezinta “conceptul microscopului de forta atomica”, integrat in laboratoarele de masurari si procesari micronanomecatronice din cadrul Institutului National de Cercetare Dezvoltare pentru Mecatronica si Tehnica Masurarii INCDMTM Bucuresti, cu descrieri structurale – functionale – scanari laser – alinieri – masurari – imagini de suprafata straturi subtiri, etc. Lucrarea stiintifica prezinta in ansamblul sau, procedurile de masurare si scanare, imagini ale topografiei suprafetei straturilor subtiri, fenomenele intime de interactie intre varful de palpare si atomii probei, relatiile intre tipurile de deformatii ale indoirii cantileverului, conexiunile inverse intr-un punct de sprijin pentru detectarea optica etc.

Cuvinte cheie: microscopie inteligenta; microscop de forta atomica; scanare laser; controller SPM; computer.

Abstract: The scientific paper presents “the concept of the atomic force microscope”, integrated into the micro-nano-mechatronic measuring and processing laboratories in The National Institute for Research and Development in Mechatronics and Measurement INCDMTM Bucharest, with structural and functional descriptions, laser scanning, alignments, surface images of thin layers and so on. The scientific paper presents mainly the measuring and scanning procedures, images of the surface topography, intimate phenomena of interaction between the palpating tip and the atoms of the probe, the relations between the types of deformation of bending of the cantilever, the inverse connections in a balancing point for optical detection and so on.

Keywords: Intelligent microscopes; atomic force microscope; laser scanning; SPM controller; computer

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