DESIGN AND SIMULATIONS OF IDC SENSOR USING COMSOL MULTYPHYSICS AND DIELECTRIC SPECTROSCOPY OF LTCC MATERIALS

Autor/autori: Nenad ZORIC, Anatolie IAVORSCHI, Mariana SIRETEANU, Georgiana VIZITEU, Romeo CIOBANU

Rezumat: In aceasta lucrare sunt prezentate permitivitatea relativa ?r si pierderea tangenta tan? a ceramicilor LTCC fabricate de Heraeus Circuit Materials Division, care au fost testate in gama de frecvente de la 10 MHz la 1 GHz la temperatura camerei. Sistemul de masuratori a spectroscopiei dielectrice si caracterizarea materialelor LTCC au fost efectuate pe analizorul de impedanta Agilent 4191. Rezultatele obtinute ca urmare la caracterizarea dielectrica au fost utilizate in modelari 3D si simulari de senzori de tip IDC pentru monitorizarea mediului.

Cuvinte cheie: Proprietati dielectrice; Spectroscopie dielectrica, LTCC, Senzori, IDC, Permitivitate, Comsol, Simulari.

Abstract: In this paper are shown relative permittivity ?r and loss tangent tan ?, of LTCC ceramics manufactured by Heraeus Circuit Materials Division, which are tested for frequencies at range 10 MHz to 1 GHz at room temperature. The measurements system for dielectric spectroscopy and characterization of LTCC materials were conducted on the impedance analyzer Agilent 4191. Obtained results due dielectric characterization were used in 3D modeling and simulations of IDC sensor for environmental monitoring

Keywords: Dielectric Properties; Dielectric spectroscopy; LTCC; Sensors; IDC; Permittivity; COMSOL; Simulations;

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